Kutulutsa Mpweya ndi Tinthu Tating'onoting'ono: Momwe Kumaliza Pamwamba Kumakhudzira Kuyera kwa Mpweya

Mu makina a mpweya oyera kwambiri masiku ano, kusiyana pakati pa njira yopindulitsa ndi kulephera kokwera mtengo nthawi zambiri kumadalira zomwe simukuziwona. Chinyezi ndi tinthu tating'onoting'ono - tomwe timayesedwa m'magawo pa biliyoni imodzi kapena ngakhale magawo pa thililiyoni imodzi - zimatha kuipitsa mpweya pang'onopang'ono, kuwononga khalidwe la chinthu, ndikutseka mizere yopanga semiconductor. Ngakhale kuti zida zosefera, zoyeretsera, ndi zowongolera kuyenda kwa mpweya zimalandira chidwi chachikulu, chimodzi mwa zinthu zofunika kwambiri pa kuyera kwa mpweya ndi pamwamba pa chubu chomwe chimanyamula mpweyawo. Momwe pamwamba pake pamalizidwira zimatsimikizira kuchuluka kwa chinyezi chomwe chingamwe, kuchuluka kwa tinthu tating'onoting'ono tomwe chingagwire, ndi kuchuluka kwa mpweya womwe ungatuluke pa nthawi yonse ya dongosololi. Bukuli likufotokoza njira zotulutsira chinyezi ndi tinthu tating'onoting'ono, limawerengera momwe kutsirizira kwa pamwamba pa kuyera kwa mpweya kumakhudzira, ndikuwonetsa njira zomaliza ndi zogwirira ntchito zomwe zimagwiritsidwa ntchito popereka kuyera kwapamwamba kwambiri (UHP).

Kodi Kutaya Gasi N'chiyani Ndipo N'chifukwa Chiyani Kuli Kofunika?

Kutulutsa mpweya m'thupi ndi kutulutsa pang'onopang'ono mpweya ndi chinyezi zomwe zimayamwa kapena kuyamwa pamwamba pa chinthu kapena kusungunuka mkati mwa zigawo zake zapafupi. Kutulutsa kumeneku kumachitika pamene mphamvu yozungulira ikutsika, kutentha kukukwera, kapena mpweya woyeretsa ukufalikira pamwamba - zomwe zimapezeka mu makina operekera mpweya, zipinda zotsukira mpweya, ndi zida zowunikira. Mu makina osapanga dzimbiri achitsulo, nthunzi ya madzi ndiye chinthu chofala kwambiri chotulutsa mpweya m'thupi, kutsatiridwa ndi ma hydrocarbon ndi zotsalira za njira zotsalira.

Ngakhale pa kuchuluka komwe kumawoneka kochepa, chinyezi chimatha kuchitapo kanthu ndi mpweya wapadera, tinthu ta nucleate, kuwerengera molakwika kwa kusanthula, ndi zinthu zomwe zimakhudzidwa ndi poizoni monga zowongolera kuyenda kwa madzi ambiri, ma valve, ndi zipinda zosungiramo zinthu. Pamene ma geometri a chipangizocho akuchepa ndikuwongolera mawindo, makampani opanga ma semiconductor akweza zofunikira pakuyera kwa mpweya kuchokera pa magawo pa miliyoni (ppm) kupita pa magawo pa biliyoni (ppb) ndi magawo pa trilioni (ppt). Pamlingo uwu, kutha kwa pamwamba pa chubu sikulinso tsatanetsatane wochepa - ndi mfundo yayikulu yomwe iyenera kupangidwa, kutsimikiziridwa, ndikusungidwa kuyambira pa mphero kupita ku chida.

Njira Zazikulu

Malo Okulirapo a Pamwamba

Malo ozungulira ali ndi malo akuluakulu kwambiri kuposa osalala, ndipo malo ambiri amatanthauza malo ambiri omwe chinyezi chingagwirizane. Ubalewu si wolunjika: kugwedezeka mu mawonekedwe a nsonga, zigwa, ndi masitepe ozungulira tirigu kumachulukitsa malo ogwira ntchito omwe alipo kuti azitha kulowetsedwa. Kuchepetsa kugwedezeka pamwamba - komwe kumayesedwa ngati Ra, kusiyana kwapakati pa masamu a mbiri ya pamwamba - kuyambira 0.8 µm mpaka 0.25 µm kumatha kuchotsa gawo lalikulu la malo olowetsedwa, chifukwa ming'alu yozama kwambiri, yomwe imasunga madzi molimba mtima, imachotsedwa kwathunthu. Ichi ndichifukwa chake mawonekedwe a pamwamba nthawi zambiri amafotokozedwa ngati malo obisika a chinyezi omwe amatsimikiza nthawi yomwe dongosolo liyenera kutsukidwa lisanafike pa chiyero choyambirira.

Kutulutsa ndi Kutulutsa Mpweya Wonyowa

Chinyezi chimapanga mgwirizano wolimba ndi pamwamba pa chitsulo, makamaka ndi zigawo za oxide zomwe zimapangidwa mwachilengedwe pa chitsulo chosapanga dzimbiri. Pamwamba wodzaza ndi chromium, mamolekyu amadzi amayamba ndi chemisorb mwachindunji ku oxide, kenako amasonkhana ngati zigawo zotsatizana za physisorbed. Pamene chubucho chimayikidwa pa vacuum kapena mpweya woyenda, zigawozi zimatuluka pang'onopang'ono: zigawo zakunja zomangika momasuka zimatuluka poyamba, pomwe madzi a chemisorbed amapitirira ndipo amafuna mphamvu, nthawi zambiri mu mawonekedwe a kutentha, kuti amasulidwe. Zotsatira zake ndi zakuti chubu chongoyikidwa kumene kapena chosamalizidwa bwino chidzatulutsa chinyezi mu mpweya kwa maola ambiri kapena masiku angapo, kukulitsa nthawi yoyeretsa ndikusunga chiyero pansi pa zomwe zafotokozedwa.

Kutsekeka kwa Tinthu

Ming'alu, maenje, ndi malo ozungulira pa malo ouma amagwira ntchito ngati malo osungira tinthu tating'onoting'ono. Pa nthawi ya ntchito yanthawi zonse tinthu tating'onoting'ono timeneti tingamangikebe, koma kutentha, kugwedezeka, kapena kusintha kwadzidzidzi kwa kayendedwe ka madzi ndi liwiro lake kumatha kuwatulutsa, zomwe zimapangitsa kuti mpweya uipire. Pakupanga zinthu za semiconductor, tinthu tating'onoting'ono timeneti tingapangitse vuto lalikulu pa wafer, ndipo tinthu tating'onoting'ono tomwe timakhazikika m'miyendo yofa kapena m'mabowo a ma valve timakhala tovuta kuchotsa makinawo akayamba kugwira ntchito. Malo osalala, opanda ming'alu samangochepetsa kuchuluka kwa tinthu tating'onoting'ono tomwe timapangidwa, komanso amapangitsa kuti malo omwe amakhalabe osavuta kuwayeretsa ndikuwatsimikizira.

Zotsatira za Kuyera kwa Gasi

Kusankha malo omalizira pamwamba kumakhudza mwachindunji kuyera kwa mpweya, nthawi yoyeretsa, komanso kukhazikika kwa nthawi yayitali. Malo owuma mu Ra 0.5–0.8 µm - omwe ndi ofanana ndi chubu chokokedwa chozizira chomwe sichinayengedwe - amasunga chinyezi ndi tinthu tambiri. Amatuluka mpweya mwamphamvu kwambiri, amafuna nthawi yayitali yoyeretsa, ndipo nthawi zambiri amakhala oyenera kugwiritsidwa ntchito pamlingo wa ppm pomwe kuipitsidwa nthawi zina kumakhala kovomerezeka. Malo osalala mu Ra ≤ 0.25 µm, omwe nthawi zambiri amapangidwa ndi electropolishing (EP), amachita mosiyana kwambiri: amapereka malo ochepa otsekereza, kutulutsa mpweya pang'ono, komanso kupanga tinthu tating'onoting'ono kochepa. Zotsatira zake zayesedwa m'maphunziro ofalitsidwa; kafukufuku wina pa titaniyamu adawonetsa kuti kuchepetsa 35% kwa kuuma kwa pamwamba kunapangitsa kuti madzi otuluka mpweya achepe ndi 30%, ndipo zochitika zofanana zalembedwa za chitsulo chosapanga dzimbiri. Pa makina oyeretsa kwambiri a ppb- ndi ppt-level, malo opukutidwa ndi magetsi si apamwamba - ndi ofunikira.

Momwe Kutsirizira Pamwamba Kumakhudzira Magwiridwe Antchito a Dongosolo

Kumaliza pamwamba kumakhudza kwambiri kuposa kutulutsa mpweya. Kumakhudza nthawi yoyeretsa (malo osalala amafika chinyezi choyambira mwachangu), kutayika kwa tinthu timene tikuyenda pansi pa madzi, kukana dzimbiri (malo a EP okhala ndi chromium-enriched chromium amakana kuchotsedwa), komanso kuyera (malo osalala amamasula zinthu zotsukira ndikutsuka madzi kwathunthu). Kumakhudzanso kusinthasintha: kutsiriza pamwamba koyera, kolamulidwa kumapanga mtundu wokhazikika wa kusinthasintha kwa kusungunuka kwa mpweya, kuchepetsa chiopsezo cha kuphatikizika ndi kusintha kwa mtundu wa kutentha komwe kungakhale magwero a kuipitsidwa mtsogolo.

Njira Zochepetsera Vutoli

Kukwaniritsa ndi kusunga mpweya wokwanira kumafuna njira zosiyanasiyana, iliyonse ikuthandizira njira yosiyana yodetsera.

Chithandizo cha Pamwamba

Kupukuta kwa electromagnetic (EP) ndiye muyezo wabwino kwambiri wa makina a UHP. Njirayi imachotsa chitsulo chopyapyala, cholamulidwa pamwamba, kulinganiza ma micro-peaks, kutsegula ndi kuchotsa ming'alu, ndikuwonjezera kuchuluka kwa chromium mu filimu yopanda kanthu - zomwe zimapangitsa kuti pamwamba pake pakhale polimbana ndi dzimbiri komanso kuti pasakhale chinyezi. Mukasankha sitima ya gasi ya UHP, sankhanichubu chopanda msoko chopukutidwa ndi magetsiPazinthu zomwe zanyowa ndi zolumikizira zofanana; kusakaniza zomaliza mkati mwa dongosolo limodzi kumawononga ukhondo wa chogwirira chonse. Pakugwiritsa ntchito kosavuta, acid pickling ndi passivation (AP) ndi bright annealing (BA) zimapereka ukhondo wabwino komanso mtengo wake.

Kuyeretsa ndi Kusamalira

Kumaliza pamwamba kokha sikokwanira — kuyeretsa kokhwima kumachotsa zotsalira zopangira, mafuta, ndi chinyezi zomwe zidatsala kuchokera ku njira zoyambilira zopangira. Njira zodziwika bwino zimaphatikizapo kuchotsa mafuta a alkaline, kuyeretsa pogwiritsa ntchito ultrasound, ndi kutsuka m'madzi oyeretsedwa, kutsatiridwa ndi kuumitsa pamalo oyera ndi kulongedza mu chitetezo chotsekedwa, chokhala ndi matumba awiri. Kusamalira malamulo n'kofunika kwambiri: magolovesi, zida zoyera, ndi malo osungiramo zinthu zophimbidwa zimaletsa kuipitsa pakati pa mphero ndi kukhazikitsa komaliza.

Kuphika kunja

Kutenthetsa zinthu pansi pa vacuum kapena mpweya wothira madzi kumathandizira kutulutsa nthunzi ya madzi, kuchotsa chinyezi chomwe chikanatha kutuluka mu mtsinje wa ntchito panthawi yogwira ntchito. Kuphika kunja ndikofunikira kwambiri pama valve, zolumikizira, ndi malo olumikizirana, komwe mawonekedwe ndi madera omwe amakhudzidwa ndi kutentha amapanga malo osungira chinyezi obisika. Kuphatikiza ndi kutsuka kosagwira ntchito, kuphika kunja kumatha kuchepetsa nthawi yomwe makina atsopano amafunikira kuti afike pachiyero choyambirira kuyambira masiku mpaka maola.

Kuchotsa

Mpweya wopanda mpweya, womwe nthawi zambiri umakhala wa nayitrogeni kapena argon, umadutsa m'dongosololi, ndipo umachotsa zinthu zodetsa zomwe zatuluka mu mpweya ndipo umaletsa chinyezi kuti chisayambitsenso kuyamwa. Kuchotsa mpweya ndi njira yoyambira komanso yopitilira: makina opangidwa bwino amasunga kutsuka kosalekeza kwa madzi pang'onopang'ono m'magawo omwe ali pamalo oimikapo mpweya ndipo amagwiritsa ntchito mpweya woyeretsa kwambiri kuti kutsukako kusakhale gwero la kuipitsidwa.

Kusankha Zinthu

Kugwiritsa ntchito zipangizo zotulutsa mpweya wochepa kumachepetsa magwero a kuipitsidwa kwa mkati asanakhalepo. Pa ntchito ya UHP, chitsulo chosapanga dzimbiri cha 316L chopangidwa ndi VIM-VAR (vacuum induction melting kutsatiridwa ndi vacuum arc remelting) ndiye muyezo wamakampani: kusungunuka kwa vacuum kawiri kumachepetsa zinthu zomwe sizili zachitsulo ndikupanga kapangidwe kakang'ono kolimba, kofanana komwe kumakhala kosavuta kumaliza bwino komanso kosavutikira kutulutsa mpweya. Zipangizo zochepa zokhala ndi zinthu zomwe zimaphatikizidwa zimatha kugonjetsa ngakhale malo abwino kwambiri omalizira, chifukwa zinthu zomwe zimaphatikizidwa zimakhala ngati malo oyambira oyika mabowo ndi kupanga tinthu tating'onoting'ono.

Kusankha Malo Oyenera Ogwirira Ntchito Yanu

Makampani ndi njira zosiyanasiyana zimakhala ndi zofunikira zosiyanasiyana pa kuyera, ndipo kumaliza koyenera kumayesa ukhondo poyerekeza ndi mtengo ndi kupezeka. Pa ntchito zomwe kuyera kwa ppb kuli kokwanira - mwachitsanzo, mizere yoyesera yoyera kwambiri ndi zida zamankhwala - achubu chopanda msoko chowala (BA)imapereka ubwino wabwino kwambiri wa pamwamba, kuwongolera miyeso, ndi mtengo. Kuti ntchito ikhale yovuta kwambiri, zinthu zopukutidwa ndi magetsi zimasankhidwa popanda kusokoneza.

• Kupanga kwa semiconductor ndi flat-panels: EP finish, Ra ≤ 0.25 µm, 316L VIM-VAR, yokhala ndi matumba awiri komanso yovomerezeka ndi batch. Mabajeti a outgassing ndi tinthu tating'onoting'ono amafotokozedwa mu ppb-ppt ndipo amatsatiridwa ndi ma specifications a pamwamba ndi tinthu tating'onoting'ono.
• Mpweya wapadera ndi wamagetsi: Machubu a EP kapena BA apamwamba okhala ndi kumalizidwa kwamkati kolamulidwa; makabati a gasi ndi mapanelo ogawa amafuna mtundu wogwirizana kuchokera ku chinthu chilichonse.
• Mankhwala ndi biotech: Malo a EP kapena BA omwe ndi osavuta kuyeretsa ndi kutsimikizira, akukwaniritsa malangizo a ASME BPE-finish ndikuthandizira ma CIP/SIP cycles.
• Kusanthula zida ndi mpweya chromatography:chubu chopangira zidayokhala ndi kutha kolamulidwa mkati mwake komanso kulekerera kolondola kwa mawonekedwe, chifukwa kukhazikika kwa chizindikiro kumadalira mpweya wonyamulira womwe ungabwerezedwenso, wopanda kuipitsidwa.
• Njira zonse ndi mapaipi a mafakitale: Ma AP kapena BA finishes amapereka ukhondo wokwanira kuti ntchito ya ppm ikhale yotsika mtengo.

Miyezo ndi Mafotokozedwe a Makampani

Kufotokozera bwino momwe pamwamba pake pamapangidwira kumafuna chilankhulo chofala. Ra (kuuma kwapakati pa masamu) ndiye chinthu chomwe chimagwiritsidwa ntchito kwambiri, koma ntchito zofunika kwambiri zimatchulanso Rz, Rmax, ndi kuchuluka kwa peak, pamodzi ndi miyezo yoyezera kuuma pamwamba monga SEMI F19. Pa machubu osapanga dzimbiri, maumboni ambiri amaphatikizapo ASTM A269 ndi A270 pa chubu chopanda msoko komanso chaukhondo, ASME BPE ya zida zopangira bioprocessing, ndi miyezo ya SEMI ya ntchito za semiconductor. Pamene mfundo ikufuna khalidwe la EP, iyenera kunena mtengo wa Ra, njira yoyezera, ndi njira zovomerezeka - mwachitsanzo, "Ra ≤ 0.25 µm, yoyesedwa ndi stylus profilometry pamwamba pamkati, yowunikidwa ndi kutsimikiziridwa 100%.

Mafunso Ofunsidwa Kawirikawiri

Q: Kodi mtengo wa Ra umaonedwa kuti ndi UHP grade uti?

A: Makina oyeretsera kwambiri nthawi zambiri amatchula Ra ≤ 0.25 µm, ndipo mafakitale ambiri a semiconductor amafuna Ra ≤ 0.13 µm pamalo oyeretsera magetsi. Chofunikira chenicheni chimadalira njira ndi gulu la kuyera lomwe likuperekedwa.

Q: Kodi kupukuta kwamagetsi kumachotsa tinthu tating'onoting'ono?

Yankho: Kupukuta ndi magetsi kumachotsa chitsulo cholamulidwa, chomwe chimachotsa ma micro-peaks, ma laps, ndi ming'alu komwe tinthu tating'onoting'ono ndi chinyezi zimabisala. Sichilowa m'malo mwa kuyeretsa: gawo lopukutidwa ndi magetsi liyenera kutsukidwa, kutsukidwa, ndi kupakidwa m'malo oyera.

Q: Kodi kutha kwa pamwamba kumakhudza bwanji nthawi yoyeretsa?

Yankho: Malo ouma amakhala ndi chinyezi chochuluka ndipo amachitulutsa pang'onopang'ono, kotero kufika pa kuyera koyambira kumatenga nthawi yayitali. Malo osalala opukutidwa ndi magetsi amatha kuchepetsa nthawi yoyeretsa ndi maola kapena masiku, zomwe zikutanthauza kuti makampani atsopano ndi ofulumira komanso nthawi yochepa yopuma.

Q: Kodi chubu chowala chopangidwa ndi annealed (BA) chokwanira kugwiritsa ntchito mpweya?

A: Chubu cha BA chokhala ndi Ra pafupifupi 0.25–0.4 µm ndi choyenera kugwiritsidwa ntchito m'njira zambiri zoyera kwambiri komanso zamankhwala. Pa ntchito ya ppb–ppt semiconductor ndi gasi yapadera, kupukuta kwamagetsi nthawi zambiri kumafunika.

Q: Ndi zinthu ziti zomwe zili bwino kwambiri pamakina a gasi oyeretsedwa kwambiri?

A: Chitsulo chosapanga dzimbiri cha 316L chopangidwa ndi kusungunuka kwa VIM-VAR ndiye chisankho chodziwika bwino cha makina a gasi a UHP chifukwa cha kuchuluka kwake kochepa komanso kapangidwe kake koyera komanso kosasinthasintha.

Mapeto

Kumaliza pamwamba si khalidwe lokongola la mapaipi a chitsulo chosapanga dzimbiri — ndi ntchito yofunikira yomwe imayang'anira kuyamwa kwa chinyezi, kusunga tinthu tating'onoting'ono, ndi kutuluka kwa mpweya m'moyo wonse wa dongosolo la mpweya. Kumaliza bwino pamwamba ndi chinthu chofunikira kuti mupeze ndikusunga kuchuluka kwa mpweya woyera. Mwa kusankha kumaliza koyenera — kopukutidwa ndi magetsi kuti mugwiritse ntchito UHP, kowala kapena koviikidwa mu viniga ndi kusinthidwa kuti mugwiritse ntchito mosavuta — kuphatikiza ndi zinthu zotulutsa mpweya wotsika monga 316L VIM-VAR chitsulo chosapanga dzimbiri, ndikuchithandizira ndi njira zotsukira mwamphamvu, kuphika, ndi kutsuka, mainjiniya amatha kupanga njira zotumizira mpweya zomwe zimakwaniritsa zolinga zoyeretsa zofunika kwambiri ndikuzisunga pamenepo kwa moyo wonse wa chomera.