Kugwiritsa ntchito mapaipi a gasi oyeretsedwa kwambiri pamakina opanga zamagetsi

The 909 Project Very Large Scale Integrated Circuit Factory ndi ntchito yaikulu yomanga mafakitale a zamagetsi a dziko langa mkati mwa Pulani yachisanu ndi chinayi ya zaka zisanu kuti ipange tchipisi tokhala ndi mzere wa ma microns 0.18 ndi m'mimba mwake ma 200 mm.

Ukadaulo wopangira mabwalo akuluakulu ophatikizika ophatikizika kwambiri sikuti umangotengera matekinoloje apamwamba kwambiri monga ma micro-machining, komanso amayika zofunika kwambiri paukhondo wa gasi.
Gasi wochuluka wa Project 909 waperekedwa ndi mgwirizano pakati pa Praxair Utility Gas Co., Ltd. ya United States ndi maphwando oyenerera ku Shanghai kuti akhazikitse limodzi malo opangira mpweya. Malo opangira gasi ali moyandikana ndi fakitale ya 909 nyumba, kuphimba dera pafupifupi 15,000 masikweya mita. The chiyero ndi linanena bungwe zofunika zosiyanasiyana mpweya

Nayitrogeni yoyera kwambiri (PN2), nayitrogeni (N2), ndi mpweya woyeretsedwa kwambiri (PO2) amapangidwa ndi kupatukana kwa mpweya. High-purity haidrojeni (PH2) imapangidwa ndi electrolysis. Argon (Ar) ndi helium (He) amagulidwa kunja. The quasi-gasi imatsukidwa ndi kusefedwa kuti igwiritsidwe ntchito mu Project 909. Gasi wapadera amaperekedwa m'mabotolo, ndipo kabati ya botolo la gasi ili mu msonkhano wothandizana nawo wopanga dera lophatikizidwa.
Mipweya ina imaphatikizansopo dongosolo la CDA louma louma louma, lokhala ndi voliyumu yogwiritsira ntchito 4185m3/h, mame othamanga -70 ° C, ndi kukula kwa tinthu kosaposa 0.01um mu gasi pamalo ogwiritsidwa ntchito. Kupuma wothinikizidwa mpweya (BA) dongosolo, ntchito voliyumu 90m3/h, kuthamanga mame mfundo 2 ℃, tinthu kukula mu mpweya pa mfundo ntchito si wamkulu kuposa 0.3um, ndondomeko vacuum (PV) dongosolo, ntchito voliyumu 582m3/h, vacuum digiri pamalo ogwiritsira ntchito -79993Pa . Kuyeretsa vacuum (HV), voliyumu yogwiritsira ntchito 1440m3 / h, digiri ya vacuum pamalo ogwiritsira ntchito -59995 Pa. Chipinda cha compressor mpweya ndi chipinda chopopera vacuum zonse zili m'dera la fakitale ya 909.

Kusankha zipangizo za chitoliro ndi zowonjezera
Mpweya womwe umagwiritsidwa ntchito popanga VLSI uli ndi zofunikira zaukhondo kwambiri.Mapaipi apamwamba kwambiri a gasiNthawi zambiri amagwiritsidwa ntchito m'malo opangira ukhondo, ndipo ukhondo wawo uyenera kukhala wogwirizana kapena wapamwamba kuposa ukhondo wa malo omwe akugwiritsidwa ntchito! Kuphatikiza apo, mapaipi amafuta oyeretsedwa kwambiri nthawi zambiri amagwiritsidwa ntchito m'malo opangira ukhondo. Hydrojeni yoyera (PH2), mpweya woyeretsedwa kwambiri (PO2) ndi mpweya wina wapadera ndi woyaka, wophulika, wothandiza kuyaka kapena mpweya wapoizoni. Ngati dongosolo la mapaipi a gasi silinapangidwe molakwika kapena zipangizo zosasankhidwa bwino, sikuti chiyero cha gasi chomwe chimagwiritsidwa ntchito pa gasi chidzachepa, koma chidzalephera. Imakwaniritsa zofunikira za ndondomekoyi, koma ndiyosatetezeka kugwiritsira ntchito ndipo idzawononga fakitale yoyera, zomwe zimakhudza chitetezo ndi ukhondo wa fakitale yoyera.
Chitsimikizo cha khalidwe la mpweya woyeretsedwa kwambiri pamalo ogwiritsidwa ntchito sichimangodalira kulondola kwa kupanga gasi, zipangizo zoyeretsera ndi zosefera, komanso zimakhudzidwa kwambiri ndi zinthu zambiri mu dongosolo la mapaipi. Ngati tidalira zida zopangira gasi, zida zoyeretsera ndi zosefera Ndizolakwika kuyika zofunikira zolondola kwambiri kuti tilipire mapangidwe osayenera a mapaipi a gasi kapena kusankha zinthu.
Pakukonza pulojekiti ya 909, tidatsatira "Code for Design of Clean Plants" GBJ73-84 (muyezo wapano ndi (GB50073-2001)), "Code for Design of Compressed Air Stations" GBJ29-90, "Code kwa Mapangidwe a Oxygen Stations" GB50030-91 , "Code for Design of Hydrogen and Oxygen Stations" GB50177-93, ndi njira zoyenera zaukadaulo pakusankha zida zamapaipi ndi zowonjezera. "Code for Design of Clean Plants" imafotokoza kusankha kwa zida zamapaipi ndi mavavu motere:

(1) Ngati mpweya chiyero ndi wamkulu kuposa kapena wofanana 99.999% ndi mfundo mame ndi m'munsi kuposa -76 ° C, 00Cr17Ni12Mo2Ti otsika mpweya zosapanga dzimbiri chitoliro (316L) ndi electropolished mkati khoma kapena OCr18Ni9 zosapanga dzimbiri chitoliro (304) ndi khoma lamkati la electropolished liyenera kugwiritsidwa ntchito. Valavu iyenera kukhala ya diaphragm kapena valavu.

(2) Ngati chiyero cha mpweya ndi chachikulu kuposa kapena chofanana ndi 99.99% ndipo mame ndi otsika kuposa -60 ° C, chubu cha OCr18Ni9 chosapanga dzimbiri (304) chokhala ndi khoma lamkati la electropolished chiyenera kugwiritsidwa ntchito. Kupatula mavavu omwe amayenera kugwiritsidwa ntchito popanga mapaipi oyaka moto, mavavu ampira ayenera kugwiritsidwa ntchito popanga mapaipi ena.

(3) Ngati mame a mpweya wouma wouma ndi wotsika kuposa -70 ° C, chitoliro cha OCr18Ni9 chosapanga dzimbiri (304) chokhala ndi khoma lamkati lopukutidwa chiyenera kugwiritsidwa ntchito. Ngati mame ndi otsika kuposa -40 ℃, chitoliro chachitsulo chosapanga dzimbiri cha OCr18Ni9 (304) kapena chitoliro chotentha chovimbidwa ndi chitsulo chosasinthika chiyenera kugwiritsidwa ntchito. Chovalacho chiyenera kukhala valavu kapena valavu ya mpira.

(4) Zida za valve ziyenera kugwirizana ndi chitoliro cholumikizira.

Malinga ndi zomwe zimafunikira komanso zofunikira zaukadaulo, timaganizira kwambiri izi posankha zida zamapaipi:

(1) The mpweya permeability zipangizo chitoliro ayenera kukhala ochepa. Mapaipi azinthu zosiyanasiyana amakhala ndi mpweya wosiyanasiyana. Ngati mapaipi okhala ndi mpweya wambiri amasankhidwa, kuipitsa sikungathe kuchotsedwa. Mipope yachitsulo chosapanga dzimbiri ndi mapaipi amkuwa ndi bwino kuteteza kulowa ndi dzimbiri kwa mpweya mu mlengalenga. Komabe, popeza kuti mipope yazitsulo zosapanga dzimbiri imakhala yochepa kwambiri kuposa mipope yamkuwa, mipope yamkuwa imakhala yogwira ntchito kwambiri kulola kuti chinyontho cha m’mlengalenga chiloŵe m’malo awo amkati. Choncho, posankha mapaipi a mapaipi apamwamba kwambiri a gasi, zitsulo zosapanga dzimbiri ziyenera kukhala zoyamba kusankha.

(2) Pakatikati pazitsulo za chitoliro ndi adsorbed ndipo zimakhala ndi zotsatira zochepa pofufuza mpweya. Pambuyo pokonza chitoliro chachitsulo chosapanga dzimbiri, kuchuluka kwa mpweya kumasungidwa muzitsulo zake zachitsulo. Mpweya woyeretsedwa kwambiri ukadutsa, gawoli la gasilo limalowa mumlengalenga ndikuyambitsa kuipitsa. Panthawi imodzimodziyo, chifukwa cha kudsorption ndi kusanthula, zitsulo zomwe zili mkati mwa chitoliro zidzatulutsanso ufa wochuluka, zomwe zimayambitsa kuipitsidwa kwa mpweya woyeretsa kwambiri. Kwa makina apaipi okhala ndi chiyero choposa 99.999% kapena ppb level, 00Cr17Ni12Mo2Ti chitoliro chotsika cha carbon stainless steel (316L) chiyenera kugwiritsidwa ntchito.

(3) Kukaniza kwa mipope yachitsulo chosapanga dzimbiri ndikwabwino kuposa mapaipi amkuwa, ndipo fumbi lachitsulo lopangidwa ndi kukokoloka kwa mpweya ndi locheperako. Zokambirana zopanga zokhala ndi zofunikira zapamwamba zaukhondo zitha kugwiritsa ntchito mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) kapena OCr18Ni9 mapaipi achitsulo osapanga dzimbiri (304), mapaipi amkuwa sagwiritsidwa ntchito.

(4) Kwa mapaipi okhala ndi ukhondo wa gasi pamwamba pa 99.999% kapena ppb kapena milingo ya ppt, kapena m'zipinda zoyera zokhala ndi ukhondo wa mpweya wa N1-N6 wotchulidwa mu "Clean Factory Design Code", mapaipi osayera kwambiri kapenaEP ultra-clean mapaipiziyenera kugwiritsidwa ntchito. Yeretsani “chubu choyera chokhala ndi mkati mofewa kwambiri”.

(5) Makina ena apadera a mapaipi a gasi omwe amagwiritsidwa ntchito popanga ndi mpweya wowononga kwambiri. Mapaipi omwe ali m'mapaipiwa ayenera kugwiritsa ntchito mipope yachitsulo yosapanga dzimbiri yosagwira ngati mapaipi. Apo ayi, mapaipi adzawonongeka chifukwa cha dzimbiri. Ngati madontho a dzimbiri achitika pamwamba, mapaipi wamba achitsulo opanda msokonezo kapena mapaipi achitsulo opangidwa ndi malata sayenera kugwiritsidwa ntchito.

(6) Mfundo zonse zolumikizira mapaipi a gasi ziyenera kuwotcherera. Popeza kuwotcherera mapaipi zitsulo kanasonkhezereka adzawononga kanasonkhezereka wosanjikiza, kanasonkhezereka zitsulo mapaipi si ntchito mapaipi mu zipinda zoyera.

Poganizira zomwe zili pamwambazi, mapaipi a gasi ndi ma valve omwe asankhidwa mu &7& projekiti ndi motere:

Mapaipi apamwamba kwambiri a nayitrogeni (PN2) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati opangidwa ndi electropolished, ndipo mavavu amapangidwa ndi zitsulo zosapanga dzimbiri zazitsulo zomwezo.
Mapaipi a nayitrogeni (N2) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati opangidwa ndi electropolished, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.
Mapaipi apamwamba kwambiri a hydrogen (PH2) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati opangidwa ndi electropolished, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.
Mapaipi amtundu wa okosijeni (PO2) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati opukutidwa ndi ma elekitirodi, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.
Mapaipi a Argon (Ar) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati a electropolished, ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo amagwiritsidwa ntchito.
Mapaipi a helium (He) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati a electropolished, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.
Mipope yoyera youma (CDA) imapangidwa ndi mapaipi achitsulo osapanga dzimbiri a OCr18Ni9 (304) okhala ndi makoma amkati opukutidwa, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.
Mapaipi a mpweya wopumira (BA) amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a OCr18Ni9 (304) okhala ndi makoma amkati opukutidwa, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.
Mapaipi a system vacuum (PV) amapangidwa ndi mapaipi a UPVC, ndipo mavavu amapangidwa ndi vacuum butterfly mavavu opangidwa ndi zinthu zomwezo.
Mapaipi a vacuum vacuum (HV) amapangidwa ndi mapaipi a UPVC, ndipo mavavu amapangidwa ndi ma vacuum agulugufe opangidwa ndi zinthu zomwezo.
Mapaipi amagetsi apadera amapangidwa ndi mapaipi achitsulo osapanga dzimbiri a 00Cr17Ni12Mo2Ti (316L) okhala ndi makoma amkati a electropolished, ndipo mavavu amapangidwa ndi mavavu achitsulo osapanga dzimbiri azinthu zomwezo.

3 Kumanga ndi kukhazikitsa mapaipi
3.1 Ndime 8.3 ya “Clean Factory Building Design Code” imafotokoza izi polumikizira mapaipi:
(1) Kulumikiza mapaipi kuyenera kuwotcherera, koma mipope yachitsulo yovimbika yotentha iyenera kulumikizidwa. Zosindikizira zolumikizira ulusi ziyenera kutsatira zomwe zili mu Ndime 8.3.3 yazomwezi.
(2) Mipope yachitsulo chosapanga dzimbiri iyenera kulumikizidwa ndi kuwotcherera kwa argon arc ndi kuwotcherera kwa matako kapena kuwotcherera zitsulo, koma mapaipi amafuta oyeretsedwa kwambiri ayenera kulumikizidwa ndi kuwotcherera kwa matako popanda zizindikiro pakhoma lamkati.
(3) Kulumikizana pakati pa mapaipi ndi zida kuyenera kutsata zofunikira zolumikizira zidazo. Mukamagwiritsa ntchito kulumikiza payipi, mapaipi achitsulo ayenera kugwiritsidwa ntchito.
(4) Kugwirizana pakati pa mapaipi ndi ma valve ayenera kutsatira malamulo otsatirawa

① Zida zosindikizira zomwe zimalumikiza mapaipi amafuta oyeretsedwa kwambiri ndi mavavu ayenera kugwiritsa ntchito ma gaskets achitsulo kapena ma ferrules awiri malinga ndi zofunikira pakupanga ndi mawonekedwe a mpweya.
②Zinthu zosindikizira pa ulusi kapena flange ziyenera kukhala polytetrafluoroethylene.
3.2 Malingana ndi zofunikira za ndondomeko ndi zofunikira zamakono, kugwirizana kwa mapaipi a gasi oyeretsedwa kwambiri ayenera kuwotcherera momwe angathere. Direct butt kuwotcherera kuyenera kupewedwa panthawi yowotcherera. Manja a chitoliro kapena zolumikizira zomalizidwa ziyenera kugwiritsidwa ntchito. Manja a chitoliro ayenera kupangidwa ndi zinthu zomwezo komanso kusalala kwamkati ngati mapaipi. mlingo, pa kuwotcherera, pofuna kupewa makutidwe ndi okosijeni wa kuwotcherera mbali, koyera zoteteza mpweya ayenera anayambitsa mu kuwotcherera chitoliro. Kwa mapaipi osapanga dzimbiri, kuwotcherera kwa argon arc kuyenera kugwiritsidwa ntchito, ndipo mpweya wa argon wachiyero womwewo uyenera kulowetsedwa mu chitoliro. Kulumikizana kwa ulusi kapena ulusi wolumikizana kuyenera kugwiritsidwa ntchito. Mukalumikiza ma flanges, ma ferrules ayenera kugwiritsidwa ntchito polumikizira ulusi. Kupatula mapaipi a okosijeni ndi mapaipi a haidrojeni, omwe amayenera kugwiritsa ntchito ma gaskets achitsulo, mapaipi ena ayenera kugwiritsa ntchito ma gaskets a polytetrafluoroethylene. Kupaka kamphindi kakang'ono ka mphira wa silikoni ku gaskets kudzakhalanso kothandiza. Wonjezerani kusindikiza. Zofananazo ziyenera kuchitidwa pamene kugwirizana kwa flange kupangidwa.
Ntchito yoyika isanayambe, kuyang'ana mwatsatanetsatane kwa mapaipi,zopangira, ma valve, ndi zina zotero ziyenera kuchitidwa. Khoma lamkati la mipope yachitsulo yosapanga dzimbiri liyenera kuzifutsa musanayike. Mapaipi, zopangira, mavavu, ndi zina zotere za mapaipi a okosijeni ziyenera kuletsedwa kwathunthu kumafuta, ndipo ziyenera kuchepetsedwa kwambiri malinga ndi zofunikira musanayike.
Dongosololi lisanakhazikitsidwe ndikugwiritsidwa ntchito, njira yopatsira ndi kugawa mapaipi iyenera kutsukidwa kwathunthu ndi mpweya woyeretsedwa kwambiri. Izi sizimangophulitsa tinthu tating'onoting'ono tomwe tidagwa mwangozi m'dongosolo la unsembe, komanso zimagwiranso ntchito yowumitsa mapaipi, ndikuchotsa gawo la mpweya wokhala ndi chinyezi womwe umatengedwa ndi khoma la chitoliro komanso zinthu zapaipi.

4. Kuyesedwa kwa mapaipi ndi kuvomereza
(1) Dongosolo likakhazikitsidwa, 100% yowunikira mapaipi omwe amanyamula madzi oopsa kwambiri m'mapaipi apadera agasi adzachitika, ndipo mtundu wawo sudzakhala wotsika kuposa Level II. Mapaipi ena ayenera kuyang'aniridwa ndi sampuli za radiographic, ndipo chiŵerengero cha sampuli sichiyenera kukhala chocheperapo 5%, khalidwe silidzakhala lotsika kuposa kalasi ya III.
(2) Pambuyo podutsa kuyendera kosawononga, kuyesa kupanikizika kuyenera kuchitidwa. Pofuna kutsimikizira kuuma ndi ukhondo wa mapaipi, kuyesa kwa hydraulic pressure sikuyenera kuchitidwa, koma kuyesa kwa pneumatic pressure kuyenera kugwiritsidwa ntchito. Kuyeza kuthamanga kwa mpweya kuyenera kuchitidwa pogwiritsa ntchito nayitrogeni kapena mpweya woponderezedwa womwe umagwirizana ndi ukhondo wa chipinda choyera. Kukakamiza kwa payipi yoyeserera kuyenera kukhala 1.15 kuwirikiza kamangidwe kake, ndipo kukakamiza kwa payipi ya vacuum kuyenera kukhala 0.2MPa. Pakuyesedwa, kupanikizika kuyenera kuwonjezereka pang'onopang'ono komanso pang'onopang'ono. Kupanikizika kukakwera mpaka 50% ya kukakamizidwa kwa mayeso, ngati palibe cholakwika kapena kutayikira komwe kukupezeka, pitilizani kuonjeza kukakamiza pang'onopang'ono ndi 10% ya kukakamiza kwa mayeso, ndikukhazikitsa kukakamiza kwa mphindi 3 pamlingo uliwonse mpaka kuthamanga kwa mayeso. . Khazikitsani kuthamanga kwa mphindi 10, kenaka muchepetse kupanikizika kwa mapangidwe. Nthawi yoyimitsa kukakamiza iyenera kutsimikiziridwa molingana ndi zosowa za kuzindikira kutayikira. Wothandizira thovu ndi woyenera ngati palibe kutayikira.
(3) Pambuyo poyesa makina otsekemera, amayeneranso kuyesa digiri ya vacuum ya maola 24 malinga ndi zolemba zapangidwe, ndipo kuthamanga kwapakati sikuyenera kukhala kwakukulu kuposa 5%.
(4) Kutuluka magazi. Kwa machitidwe a mapaipi a ppb ndi ppt grade, malinga ndi zofunikira, palibe kutayikira komwe kumayenera kuganiziridwa ngati koyenera, koma kuyesa kwa kuchuluka kwa kutayikira kumagwiritsidwa ntchito pakupanga, ndiye kuti, kuyesa kuchuluka kwa kutayikira kumachitika pambuyo poyesa kulimba kwa mpweya. Kupsyinjika ndiko kugwira ntchito, ndipo kupanikizika kumayimitsidwa kwa maola 24. Kutaya kwapakati pa ola limodzi ndikochepera kapena kofanana ndi 50ppm monga koyenera. Kuwerengera kwa leakage ndi motere:
A=(1-P2T1/P1T2)*100/T
Mu formula:
Kutaya kwa ola limodzi (%)
P1-Kupanikizika kotheratu kumayambiriro kwa mayeso (Pa)
Kupanikizika kwa P2-Absolute kumapeto kwa mayeso (Pa)
T1-kutentha kwathunthu kumayambiriro kwa mayeso (K)
T2-kutentha kwathunthu kumapeto kwa mayeso (K)